Cantilever-Based Biosensors in CMOS Technology

K. -U. Kirstein, Y. Li, M. Zimmermann, C. Vancura, T. Volden, W. H. Song, J. Lichtenberg, A. Hierlemannn

Single-chip CMOS-based biosensors that feature microcantilevers as transducer elements are presented. The cantilevers are functionalized for the capturing of specific analytes, e.g., proteins or DNA. The binding of the analyte changes the mechanical properties of the cantilevers such as surface stress and resonant frequency, which can be detected by an integrated Wheatstone bridge. The monolithic integrated readout allows for a high signal-to-noise ratio, lowers the sensitivity to external interference and enables autonomous device operation.

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